TRANSFER VALVE/INSERT L-MOTIOM,SERIES 04.3/05.3For load lock and process chamber isolation in semiconductor production systems.Especially suited for corrosive processes such as etch or CVD.
用于半导体生产系统中的负载锁定和工艺室隔离。
特别适用于腐蚀性工艺,如蚀刻或化学气相沉积。
TRANSFER VALVE / INSERT L-MOTION, SERIES 04.3/ 05.3