VAT 传送阀 插入L-MOTION 04.3/05.3系列

TRANSFER VALVE/INSERT L-MOTIOM,SERIES 04.3/05.3

For load lock and process chamber isolation in semiconductor production systems.
Especially suited for corrosive processes such as etch or CVD.

用于半导体生产系统中的负载锁定和工艺室隔离。

特别适用于腐蚀性工艺,如蚀刻或化学气相沉积。

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TRANSFER VALVE/INSERT L-MOTIOM,SERIES 04.3/05.3

For load lock and process chamber isolation in semiconductor production systems.
Especially suited for corrosive processes such as etch or CVD.

用于半导体生产系统中的负载锁定和工艺室隔离。

特别适用于腐蚀性工艺,如蚀刻或化学气相沉积。



详细参数可查看(此处可下载)

TRANSFER VALVE / INSERT L-MOTION, SERIES 04.3/ 05.3