TRANSFER VALVE/INSERT L-VAT,SERIES 04.2/05.2

For load lock and process chamber isolation in semiconductor production systems.
Especially suited for corrosive processes such as etch or CVD.

用于半导体生产系统中的负载锁定和工艺室隔离。

特别适用于腐蚀性工艺，如蚀刻或化学气相沉积。