VAT 传送阀 插入L-VAT 04.1/05.1系列

TRANSFER VALVE/INSERT L-VAT,SERIES 04.1/0.51

For load lock and process chamber isolation in semiconductor production systems.
Especially suited for corrosive processes such as etch or CVD.

用于半导体生产系统中的负载锁定和工艺室隔离。

特别适用于腐蚀性工艺,如蚀刻或化学气相沉积。

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TRANSFER VALVE/INSERT L-VAT,SERIES 04.1/0.51

For load lock and process chamber isolation in semiconductor production systems.
Especially suited for corrosive processes such as etch or CVD.

用于半导体生产系统中的负载锁定和工艺室隔离。

特别适用于腐蚀性工艺,如蚀刻或化学气相沉积。