TRANSFER VALVE/INSERT MONOVAT,SERIES 02.2/ 03.2For load lock and process chamber isolation in semiconductor production systems for 200,300 and 450 mm wafers.用于200,300和450mm晶圆半导体生产系统中的负载锁定和工艺室隔离。
TRANSFER VALVE / INSERT MONOVAT, SERIES 02.2 / 03.2