VAT 传送阀 插入MONOVAT 02.2/03.2系列

TRANSFER VALVE/INSERT MONOVAT,SERIES 02.2/ 03.2

For load lock and process chamber isolation in semiconductor production systems for 200,300 and 450 mm wafers.
用于200,300和450mm晶圆半导体生产系统中的负载锁定和工艺室隔离。

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TRANSFER VALVE/INSERT MONOVAT,SERIES 02.2/ 03.2

For load lock and process chamber isolation in semiconductor production systems for 200,300 and 450 mm wafers.
用于200,300和450mm晶圆半导体生产系统中的负载锁定和工艺室隔离。



详细参数可查看(此处可下载)

TRANSFER VALVE / INSERT MONOVAT, SERIES 02.2 / 03.2