VAT 传送阀 插入MONOVAT 02.1/03.1系列

TRANSFER VALVE / INSERT MONOVAT, SERIES 02.1 / 03.1

For load lock and process chamber isolation in semiconductor production systems for 200 and 300 mm wafers
用于200毫米和300毫米晶圆的半导体生产系统中的负载锁定和工艺室隔离

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TRANSFER VALVE / INSERT MONOVAT, SERIES 02.1 / 03.1

For load lock and process chamber isolation in semiconductor production systems for 200 and 300 mm wafers
用于200毫米和300毫米晶圆的半导体生产系统中的负载锁定和工艺室隔离



详细参数可查看(此处可下载)

TRANSFER VALVE / INSERT MONOVAT, SERIES 02.1 / 03.1