• 1/1

Integrated Plasma Cleaning System

Zhuoling Integrated Plasma Cleaning System is an intelligent cleaning device tailored for research institutes and high-end manufacturing fields. With low-damage surface treatment and high cleaning efficiency as its core design concepts, the system can efficiently remove particles, moisture and organic residues on the surfaces of vacuum equipment chambers and precision components. It enables online cleaning, non-destructive maintenance and intelligent control, helping users build a vacuum environment with high stability and high cleanliness.
Book Now
Detail

Six Core Systems

• Intelligent Gas Filling System: Dual-channel gas mixing design, supporting precise proportioning of multiple gases; Equipped with high-precision mass flow meters to ensure stable and uniform gas flow.

• High-Efficiency Pumping & Pressure Control System: Integrated with high-performance vacuum pumps and intelligent pressure control modules; Enables rapid pumping and dynamic pressure stabilization to ensure safe and reliable cleaning processes.

• On-line Mass Spectrometry Analysis System: Real-time detection of residual gas components after cleaning; Realizes visualization and traceability of cleaning results.

• Precision Baking & Temperature Control System: Three independent temperature control channels with a maximum heating power of 2500 W; Maintains stable temperature control to improve the desorption and removal efficiency of contaminants.

• Adjustable Plasma Excitation System: Radio frequency (RF) power supply drives glow discharge to generate high-activity plasma; Adjustable power and replaceable electrodes to meet cleaning requirements of multiple scenarios.

• Intelligent Data Control System: Integrated control platform for centralized management of gas, vacuum, RF, temperature control and other modules; Supports data recording, trend analysis and remote monitoring.


✔   After receiving the information, our sales staff/product engineers will contact you.

✔   Some products can be customized according to your requirements.

✔   Your information will be kept confidential throughout the entire process.

  • *
  • *
  • *
Phone：0551-63637062