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Slow Evacuation and Slow Inlet Gas Supply Unit
Mirror-type gas supply system with an excellent human-machine interface
No micro-dust transmission occurs when the gas flow rate is less than 3 L/min or the gas pressure is less than 100 Pa
All-metal sealing, with a background vacuum level better than 5.0×10⁻⁶ Pa
Leak detection module is optional, and the regulation of non-equilibrium state can be achieved when connected for use
No micro-dust transmission occurs when the gas flow rate is less than 3 L/min or the gas pressure is less than 100 Pa
All-metal sealing, with a background vacuum level better than 5.0×10⁻⁶ Pa
Leak detection module is optional, and the regulation of non-equilibrium state can be achieved when connected for use
Detail
✔ After receiving the information, our sales staff/product engineers will contact you.
✔ Some products can be customized according to your requirements.
✔ Your information will be kept confidential throughout the entire process.
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Phone：0551-63637062