Zhuoling Integrated Plasma Cleaning System IPCS1000: Unlocking a New Path to Efficient Upgrades in Precision Manufacturing!

System Overview | System Overview

The Zhuoling Integrated Plasma Cleaning System IPCS1000 is an intelligent cleaning equipment designed for research institutions and high‑end manufacturing fields. With low‑damage surface treatment and high cleaning efficiency as its core design concepts, the system can effectively remove particles, moisture, and organic residues from the surfaces of vacuum chambers and precision components. It enables online cleaning, non‑destructive maintenance, and intelligent control, helping users build a highly stable and ultra‑clean vacuum environment.

Six Core Modules | Six Core Modules

• Intelligent Gas Supply System: Dual‑channel gas mixing design supports precise multi‑gas ratio control; high‑precision mass flow meters ensure stable and uniform gas flow.

Gas Supply System Diagram

• High‑Efficiency Pumping and Pressure Control System: Integrates high‑performance vacuum pumps and intelligent pressure control modules; enables rapid pumping and dynamic pressure stabilization to ensure safe and reliable cleaning processes.

Pumping and Mass Spectrometry Analysis System Diagram

• Online Mass Spectrometry Analysis System: Real‑time detection of residual gas components after cleaning; cleaning results are visualized and traceable.

Mass Spectrometry Analysis Software Interface

• Precision Baking and Temperature Control System: Three independent temperature control channels with a maximum heating power of 2500W; stable temperature control enhances contaminant desorption and removal efficiency.

System Control Software Interface

• Adjustable Plasma Excitation System: RF power supply drives glow discharge to generate highly reactive plasma; adjustable power and replaceable electrodes meet diverse cleaning requirements.

Plasma Excitation Diagram

• Intelligent Data Control System: Integrated control platform centrally manages gas, vacuum, RF, temperature control, and other modules; supports data logging, trend analysis, and remote monitoring.

Stabilized Pressure Data Analysis Chart

Residual Gas Analysis Chart

Key Advantages | Key Advantages

Compared with traditional plasma cleaning systems, the Zhuoling Glow Discharge System FDQX‑001 offers significant advantages in plasma density, cleaning precision, intelligent control, and reliability.

Application Value | Application Value

• Improves vacuum system cleanliness and stability
• Reduces equipment downtime and lowers manual maintenance costs
• Suitable for semiconductor manufacturing, optical coating, scientific research equipment, and other fields
• Supports research‑grade customization and industrial‑scale deployment

Customer Benefits | Customer Benefits

Cleaning efficiency is improved by approximately 40%, cleanliness is increased by 60%, maintenance downtime is extended by 1.5 times, and automated operation reduces labor input while enhancing system reliability and maintainability.

Target Industries | Target Industries

Semiconductor manufacturing, optical thin films, vacuum coating, research laboratories, aerospace precision manufacturing, etc.

Our Vision | Our Vision

With precision craftsmanship as the foundation and plasma technology as the core, we aim to create intelligent and reliable vacuum cleaning solutions that support scientific innovation and industrial upgrading.